ETCH蝕刻陶瓷環
首頁 》 精密機械設備及備件類》ETCH蝕刻陶瓷環
愛銳精密科技大連有限公司，AMAT，LAM，NOVELLUS， TEL， VARIAN， MATTSON等設備的專用氧化鋁，藍寶石，石英，氧化釔等各種材質刻蝕環
產品采用高純度氧化鋁材料，藍寶石，石英材料，氧化釔材質經成型，后期精密機械加工，研磨，清洗等工藝，后期經過無塵室嚴格清洗管理，真空包裝后提供給客戶。得到國內及日本，韓國，美國等眾多世界知名大廠的采用，產品質量穩定，精度高，可以得到高品質的半導體IC產品。
以下為本公司可以根據圖紙號進行確認生產的產品。當然也可以根據客戶的需要按圖紙進行進行定制，如果您有需求向本司咨詢。
| NO. | Maker? | Wafer Size? | OEM No.? | Part Name? | Material? |
| 1 | AMAT? | 200 | 0200-00261? | CHAMBER INSERT 200MM? | Al2O3? |
| 2 | AMAT? | 200 | 0200-00468? | IMP FEEDTHRU INSULATOR? | Al2O3? |
| 3 | AMAT? | 200 | 0200-00624? | NCRS PURGE RING, WXZ+? | Al2O3? |
| 4 | AMAT? | 200 | 0200-00632? | RING SHADOW(3MM)NCRS? | Al2O3? |
| 5 | AMAT? | 200 | 0200-00945? | CAPTURE RING? | Al2O3? |
| 6 | AMAT? | 200 | 0200-01009? | Modified Top Nozzle? | AlN? |
| 7 | AMAT? | 200 | 0200-09083? | QUARTZ SHIELD? | Quartz? |
| 8 | AMAT? | 200 | 0200-10284? | LIFT PIN BK? | Al2O3? |
| 9 | AMAT? | 200 | 0200-10377? | SINGLE RING? | Al2O3? |
| 10 | AMAT? | 200 | 0200-18081? | COVER LOW PROFILE? | Al2O3? |
| 11 | AMAT? | 200 | 0200-18095? | COLLAR MINCONTACT_TELTEC? | Al2O3? |
| 12 | AMAT? | 200 | 0200-18109? | Ceramic Collar_HHNEC? | Al2O3? |
| 13 | AMAT? | 200 | 0200-20055? | INSULATOR ANTENAE PCII TI PED? | Quartz? |
| 14 | AMAT? | 200 | 0200-20285? | PEDESTAL COVER UPPER 8"? | Al2O3? |
| 15 | AMAT? | 200 | 0200-20331? | IMP Cover Ring? | Al2O3? |
| 16 | AMAT? | 200 | 0200-35287? | Ceramic Base | Al2O3? |
| 17 | AMAT? | 200 | 0200-35290? | HOUSING GAS FEED BKCeramic Base | Al2O3? |
| 18 | AMAT? | 200 | 0200-35291? | PLUG GAS NOZZLE BK? | Al2O3? |
| 19 | AMAT? | 200 | 0200-35293? | WINDOW MANOMETER PORT BK? | Al2O3? |
| 20 | AMAT? | 200 | 0200-35295? | HOUSING GAS FEED DPS A3 CH BK? | Al2O3? |
| 21 | AMAT? | 200 | 0200-35296? | GAS PLUG BK? | Al2O3? |
| 22 | AMAT? | 200 | 0200-35576? | HP TXZ LID ISOLATOR_Polishing Repair? | Al2O3? |
| 23 | AMAT? | 200 | 0200-35611? | LID LINER SCREW(CERAMIC) BK? | Al2O3? |
| 24 | AMAT? | 200 | 0200-36659? | SHADOW RING (Q'tz)? | Quartz? |
| 25 | AMAT? | 200 | 0200-36686? | Ceramic Single Ring? | Al2O3? |
| 26 | AMAT? | 200 | 0200-39133? | WINDOW END POINT PORT? | Al2O3? |
| 27 | AMAT? | 200 | 0200-39135? | WINDOW MANOMETER PORT? | Al2O3? |
| 28 | AMAT? | 200 | 0200-39137? | DPS Poly Dome? | Al2O3? |
| 29 | AMAT? | 200 | 0200-39144? | RING FOCUS 195MM SNNF 1.38? | Al2O3? |
| 30 | AMAT? | 200 | 0200-40126? | THIN BLADE(CERAMIC)? | Al2O3? |
| 31 | AMAT? | 200 | 0200-50132? | Capture Ring? | Al2O3? |
| 32 | LAM? | 200 | 716-330045-001? | RING EDGE 9408 ESC 202_HC? | Al2O3? |
| 33 | LAM? | 200 | 716-330045-002? | (L)EDGE RING(PTX)￠202 | Al2O3? |
| 34 | LAM? | 200 | 716-330120-001? | CERAMIC WINDOW FLAT | Al2O3? |
| 35 | LAM? | 200 | 716-330890-001? | Uniformity Ring? | Al2O3? |
| 36 | LAM? | 200 | 716-330892-007? | ALLIANCE 9600 GDP? | Al2O3? |
| 37 | LAM? | 200 | 716-331051-006? | UNIFORMITY RING? | Al2O3? |
| 38 | Novellus? | 200 | 15-109921-00? | C-PEC_200mm? | AlN? |
| 39 | Novellus? | 200 | 15-158185-00? | NANO CLEAN CE TUBE? | Al2O3? |
| 40 | TEL? | 200 | 1810-329022-11? | Adapter Liner (Y2O3 Coating)? | Metal? |
| 41 | TEL? | 200 | 1D10-304010-12? | RING SHIELD B3? | Al2O3? |
| 42 | AMAT? | 300 | 0010-28101? | PRODUCER LIFT PIN HOOP? | Al2O3? |
| 43 | AMAT? | 300 | 0020-05896? | Ring Deposition Clean CIP2? | Al2O3? |
| 44 | AMAT? | 300 | 0021-43884? | DPSII POLY AL LIFT PIN? | Y2O3? |
| 45 | AMAT? | 300 | 0030-52157? | Clamp Lower Center Gas Feed? | Al2O3? |
| 46 | AMAT? | 300 | 0200-00576? | Pin Weight? | Al2O3? |
| 47 | AMAT? | 300 | 0200-00933? | SCREW COVER (DPS2)? | Al2O3? |
| 48 | AMAT? | 300 | 0200-00970? | Ceramic Lid? | Al2O3? |
| 49 | AMAT? | 300 | 0200-01326? | INSULATOR SOURCE ADAPTOR Ceramic? | Al2O3? |
| 50 | AMAT? | 300 | 0200-01427? | ISOLATOR CERAMIC CVD? | Al2O3? |
| 51 | AMAT? | 300 | 0200-01461? | Gas Nozzle? | Al2O3? |
| 52 | AMAT? | 300 | 0200-01521? | BLADE? | Al2O3? |
| 53 | AMAT? | 300 | 0200-01766? | Manifold? | Al2O3? |
| 54 | AMAT? | 300 | 0200-01863? | CERAMIC ESC COVER? | Al2O3? |
| 55 | AMAT? | 300 | 0200-01991? | RING FINGER LIFT PRODUCER? | Al2O3? |
| 56 | AMAT? | 300 | 0200-02262? | Insulator Coil Support? | AlN? |
| 57 | AMAT? | 300 | 0200-02396? | LINER CERAMIC MIDDLE? | Al2O3? |
| 58 | AMAT? | 300 | 0200-02421? | ISOLATOR LID TOP CERAMIC? | Al2O3? |
| 59 | AMAT? | 300 | 0200-02469? | ManiFold? | Al2O3? |
| 60 | AMAT? | 300 | 0200-02747? | CERAMIC LID (DPS2)? | Al2O3? |
| 61 | AMAT? | 300 | 0200-02967? | CERAMIC INJECTOR (DPS2)? | Al2O3? |
| 62 | AMAT? | 300 | 0200-02972? | Pumping Liner C-Channel? | Al2O3? |
| 63 | AMAT? | 300 | 0200-03200? | Ceramic Capture Ring C TYPE DPS 2? | Al2O3? |
| 64 | AMAT? | 300 | 0200-03314? | LIFT 170 FIXED FLOATING 300? | Al2O3? |
| 65 | AMAT? | 300 | 0200-03317? | Ceramic Cover Ring C TYPE 300mm DPS 2? | Al2O3? |
| 66 | AMAT? | 300 | 0200-03433? | ESC ceramic Bushing? | Al2O3? |
| 67 | AMAT? | 300 | 0200-03598? | Ceramic Lid? | Al2O3? |
| 68 | AMAT? | 300 | 0200-03837? | INTERNAL INSULATOR? | Al2O3? |
| 69 | AMAT? | 300 | 0200-03969? | Pumping Liner SR Top? | Al2O3? |
| 70 | AMAT? | 300 | 0200-04086? | Shadow Ring? | AlN? |
| 71 | AMAT? | 300 | 0200-04146? | TOP LINER(PRO)? | Al2O3? |
| 72 | AMAT? | 300 | 0200-04294? | Top Baffle_8 Hole_ALN? | AlN? |
| 73 | AMAT? | 300 | 0200-04372? | Gas Nozzle Middle (STI) | AlN? |
| 74 | AMAT? | 300 | 0200-04474? | PRODUCER CERAMIC HOLDER ￠7.2 | Al2O3? |
| 75 | AMAT? | 300 | 0200-04654? | Pumping Liner Top SIH4 Producer SE | Al2O3? |
| 76 | AMAT? | 300 | 0200-04864? | Ceramic Plug | Al2O3? |
| 77 | AMAT? | 300 | 0200-04969? | WELDMENT? | Al2O3? |
| 78 | AMAT? | 300 | 0200-05003? | OPUS GAS INJECTOR_Y2O3? | Al2O3? |
| 79 | AMAT? | 300 | 0200-05031? | PLUG SLIT COVER? | Al2O3? |
| 80 | AMAT? | 300 | 0200-05081? | SIDE NOZZLE 1.76 AlN 14MILS? | AlN? |
| 81 | AMAT? | 300 | 0200-05465? | GAS INJECTOR(AE POLY)? | Al2O3? |
| 82 | AMAT? | 300 | 0200-05593? | AMAT HDP ULTIMA AlN BAFFLE | AlN? |
| 83 | AMAT? | 300 | 0200-05896? | No-Arc Deposition Ring | Al2O3? |
| 84 | AMAT? | 300 | 0200-05912? | LIFT PIN? | Y2O3? |
| 85 | AMAT? | 300 | 0200-05959? | G5 Single Ring? | Quartz? |
| 86 | AMAT? | 300 | 0200-06404? | OPUS Ceramic Lid? | Al2O3? |
| 87 | AMAT? | 300 | 0200-06405? | CERAMIC LID? | Al2O3? |
| 88 | AMAT? | 300 | 0200-06504? | Ultima Top Nozzle | AlN? |
| 89 | AMAT? | 300 | 0200-06615? | G5 LID | Y2O3? |
| 90 | AMAT? | 300 | 0200-06616? | MINOS GAS INJECTOR? | Y2O3? |
| 91 | AMAT? | 300 | 0200-06641? | OPUS FOCUS RING? | Al2O3? |
| 92 | AMAT? | 300 | 0200-06702? | Producer Lift Pin Guide? | Al2O3? |
| 93 | AMAT? | 300 | 0200-06801? | SIDE NOZZLE Φ0.46? | AlN? |
| 94 | AMAT? | 300 | 0200-06840? | Producer Lift Pin? | Al2O3? |
| 95 | AMAT? | 300 | 0200-06842? | Producer Lift Pin Holder? | Al2O3? |
| 96 | AMAT? | 300 | 0200-07102? | GES G5 Injector? | Y2O3? |
| 97 | AMAT? | 300 | 0200-07916? | LIFT PIN? | Al2O3? |
| 98 | AMAT? | 300 | 0200-07917? | Lift Weight? | Al2O3? |
| 99 | AMAT? | 300 | 0200-07956? | LIFT PIN 139 TRIANGULAR (Y2O3) | Al2O3? |
| 100 | AMAT? | 300 | 0200-07957? | LIFT PIN WEIGHT | Al2O3? |
| 101 | AMAT? | 300 | 0200-20492? | IMP COIL SUPPORT CAP2? | Al2O3? |
| 102 | AMAT? | 300 | 0200-20494? | IMP COIL SUPPORT CAP1? | Al2O3? |
| 103 | AMAT? | 300 | 0200-76050? | COVER,300MM PEDESTAL B101,Ce? | Al2O3? |
| 104 | AMAT? | 300 | 0200-76057? | RING,COVER 300MM B101 IMP? | Al2O3? |
| 105 | AMAT? | 300 | 0200-04593? | DPS POLY LIFT PIN? | Al2O3? |
| 106 | AMAT? | 300 | 0200-06870? | Deposition Ring? | Al2O3? |
| 107 | LAM? | 300 | 715-330825-006? | Manifold Liner? | Al2O3? |
| 108 | LAM? | 300 | 715-331211-002? | CHAMBER WALL LINER? | Al2O3? |
| 109 | LAM? | 300 | 716-003473-802? | (ACME) CERAMIC GAS INJECTOR? | Al2O3? |
| 110 | LAM? | 300 | 716-003481-822? | LAM KIYO CX Window? | Al2O3? |
| 111 | LAM? | 300 | 716-026652-832? | BASE FOCUS RING? | Al2O3? |
| 112 | LAM? | 300 | 716-031257-561? | TOP EDGE RING? | Y2O3? |
| 113 | LAM? | 300 | 716-031257-839? | CERAMIC EDGE RING? | Al2O3? |
| 114 | LAM? | 300 | 716-057993-003? | KIYO EX CERAMIC GAS INJECTOR? | Al2O3, Y2O3? |
| 115 | LAM? | 300 | 716-067667-005? | Ceramic Top Edge Ring_CT (T14.9)? | Al2O3? |
| 116 | LAM? | 300 | 716-140163-261? | Hot Edge Ring 15DEG ESC? | SILICON? |
| 117 | LAM? | 300 | 716-800330-062? | INSULATOR BOT ESC TAPPED? | Al2O3? |
| 118 | LAM? | 300 | 716-065573-004? | Lower PEZ Ring? | Y2O3? |
| 119 | LAM? | 300 | 716-003481-803? | (ACME) Ceramic Window_(UC2 Coating)_M12-UC2 Marking? | Al2O3? |
| 120 | LAM? | 300 | 719-003481-858? | LAM KIYO Crystal Window? | Al2O3? |
| 121 | Mattson? | 300 | 1010434 | RING, FOCUS PARADIGM? | Y2O3? |
| 122 | Novellus? | 300 | 15-003394-02? | SPINDLE FORK? | Al2O3? |
| 123 | Novellus? | 300 | 15-118123-00? | RING INSULATOR ANOD PVD300? | Al2O3? |
| 124 | Novellus? | 300 | 15-122178-00? | VECTOR CARRIER RING? | Al2O3? |
| 125 | Novellus? | 300 | 15-127251-01? | Novellus C3 Speed AlN PEC? | AlN? |
| 126 | Novellus? | 300 | 15-169666-00? | R-TYPE LONG INJECTOR 9.07"? | AlN? |
| 127 | Novellus? | 300 | 15-251538-00? | SAPPHIRE PIN? | SAPPHIRE? |
| 128 | Novellus? | 300 | 15-256077-02? | VECTOR EBR BLADE? | Al2O3? |
| 129 | Novellus? | 300 | 15-257351-00? | SAPPHIRE PIN NEW TYPE? | SAPPHIRE? |
| 130 | Novellus? | 300 | 15-265330-01? | STAR INJECTOR DONUT ￠2.08 | AlN? |
| 131 | Novellus? | 300 | 15-273669-00? | Upper Shield Ring | Al2O3? |
| 132 | Novellus? | 300 | 15-281612-00? | RING LTM INSULATOR? | Al2O3? |
| 133 | Novellus? | 300 | 15-287254-00? | INSERT NUT CERAMIC? | Al2O3? |
| 134 | Novellus? | 300 | 15-292820-00? | Ceramic Finger? | Al2O3? |
| 135 | Novellus? | 300 | 15-293564-00? | Blade Load/Unload MCA? | Al2O3? |
| 136 | Novellus? | 300 | 15-303364-00? | C3 SPACER DISK PEDESTAl? | Al2O3? |
| 137 | Novellus? | 300 | 15-306819-00? | SHIELD_CERAMIC RING 125_? | Al2O3? |
| 138 | Novellus? | 300 | 15-307708-00? | Plug ESC Cermic A? | Al2O3? |
| 139 | Novellus? | 300 | 15-307709-00? | Plug ESC Cermic B? | Al2O3? |
| 140 | Novellus? | 300 | 15-318364-00? | AlN STAR Wheel 1.375L | AlN? |
| 141 | Novellus? | 300 | 15-325002-00? | CARRIER RING CERAMIC? | Al2O3? |
| 142 | Novellus? | 300 | 15-327924-00? | INOVA WAFER LIFT PIN(SUS)? | INCONEL? |
| 143 | Novellus? | 300 | 15-344259-00? | CARRIER RING AHM? | Al2O3? |
| 144 | Novellus? | 300 | 15-362613-01? | Sapphire Pin _Short? | SAPPHIRE? |
| 145 | Novellus? | 300 | 15-385384-00? | SHIELD_CERAMIC INSULATOR? | Al2O3? |
| 146 | TEL? | 300 | 1D10-315649-12? | Window Shield Depo_(Y2O3)? | Al2O3? |
| 147 | TEL? | 300 | 3D10-101176-11? | DIVERGE PLATE SHIN? | Al2O3? |
| 148 | TEL? | 300 | 3M10-253256-11? | STAGE OUTER RING? | Al2O3? |
| 149 | TEL? | 300 | 3M10-307933-12? | OUTER RING D320TI? | Al2O3? |
| 150 | TEL? | 300 | 3M10-308691-12? | LIFER ARM 300T? | Al2O3? |
| 151 | TEL? | 300 | 3M10-312714-11? | PICK, TRIAS LM TAPER? | Al2O3? |
| 152 | TEL? | 300 | 3M10-406003-12? | SCREW,M4X10_ALO? | Al2O3? |
| 153 | TEL? | 300 | 3M10-409088-11? | TEL Trias Lift Pin? | Al2O3? |
| 154 | TEL? | 300 | 3M10-409092-11? | Guide Long Pin Wrap Nut? | Al2O3? |
| 155 | TEL? | 300 | 3M10-451143-11? | PIN,TAPER WRAP? | Al2O3? |
| 156 | TEL? | 300 | 3M10-451144-12? | GUIDE,TAPER PIN WRAP? | Al2O3? |
| 157 | TEL? | 300 | 3M10-455875-11? | PLATE GAS DIST? | Al2O3? |
| 158 | Varian? | 300 | E17270580? | FILAMENT INSULATOR? | Al2O3? |
| 159 | Varian? | 300 | E17296280? | Insulator Dual Mount? | Al2O3? |
| 160 | AMAT? | 0200-00298? | DPS Metal Dome? | Al2O3? | |
| 161 | AMAT? | 0200-00453? | Pin Guide(18x6.3x45.5)? | Al2O3? | |
| 162 | AMAT? | 0200-00454? | Bushing Lift Pin? | Al2O3? | |
| 163 | AMAT? | 0200-02397? | Liner Ceramic Bottom? | Al2O3? | |
| 164 | AMAT? | 0200-02677? | Depo Ring_ALPS? | Al2O3? | |
| 165 | AMAT? | 0200-04977? | ISULATOR BUSHING(15*15.6)? | AlN? | |
| 166 | AMAT? | 0200-05112? | Ultima Side Nozzle | AlN? | |
| 167 | AMAT? | 0200-05238? | AlN HDP Side Nozzle Φ0.36? | AlN? | |
| 168 | AMAT? | 0200-06112? | Wafer Blade? | Al2O3? | |
| 169 | AMAT? | 0200-24018? | 0200-24018 PIN ANTENNA BK? | Al2O3? | |
| 170 | Novellus? | 15-034333-00? | TUBE INJECTOR 4"? | Al2O3? | |
| 171 | Novellus? | 15-052375-00? | Ceramic Finger? | Al2O3? | |
| 172 | Novellus? | 15-053394-03? | SPINDLE FORK BK? | Al2O3? | |
| 173 | Novellus? | 15-169667-00? | INJECTOR SHORT OPEN TUBE? | AlN? | |
| 174 | Novellus? | 15-251847-00? | INJECTOR SHORT CLOSED? | AlN? |
KEYWORDS：AMAT，LAM，NOVELLUS， TEL， VARIAN， MATTSON等設備的專用氧化鋁，藍寶石，石英，氧化釔等各種材質刻蝕環，ETCH RING, FOCUS RING,半導體刻蝕備件
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